A Piezoelectric Liquid Micropump
Mengjia Zhu
ME 292 Design Transducers
In this project, a liquid micropump is designed using piezoelectric actuation mechanism. The piezoelectric actuation force and displacement are calculated and the volumetric flow rate is modeled. The relationship between the flap valve displacement and the fluid pressure is also obtained. Finally, the fabrication process of the micropump using the standard MEMS fabrication process is designed.
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